230210-K2-1

Type: Synthesis

ObjectId: 25431

Created: 11/12/2024 4:09:07 PM by A01, B01) Savan Alan [alans327@gmail.com]

Updated: 9/10/2026 12:11:43 AM by INF) Victor Dudarev [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: 4x APT coupons Yujiao and Elaheh/ZIM

[no file attached]

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Include all template properties
Type Name Value Comment
general process parameters
String chamber K2 K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String operator Alan
String assistant Elaheh
Float start vacuum 1.1e-008 Torr
Float process duration 132 s
Float substrate temperature 25.1 °C
Float substrate rotation 10 RPM
String process gas Ar
Float table height 91.6 mm
Float process pressure 5 mTorr
Float flow PG 60 sccm
target source configuration
Cathode 1
String target material Pd
String target ID #1 Kaistar 4N
Mag1-RF
Float ignition power cathode 1 50 W
Float pre clean power 1 50 W
Float pre clean time 1 30 s
String pre clean pressure cathode 1 20 mTorr
Float power forward cathode 1 300 W
Float set power forward cathode 1 300 W
Float act power forward cathode 1 300 W
Float power reflected cathode 1 0 W
Cathode 3
String target material Au
String target ID Sindlhauser 4N
Mag3-RF
Float ignition power cathode 3 50 W
Float pre clean power 3 50 W
Float pre clean time 3 30 s
Float pre clean pressure cathode 3 20 mTorr
Float power forward cathode 3 112 W
Float set power forward cathode 3 112 W
Float act power forward cathode 3 112 W
Float power reflected cathode 3 0 W
Cathode 4
String target material Pt
String target ID #2 MaTecK 4N
Mag4-DC
Float ignition power cathode 4 50 W
Float pre clean power 4 50 W
Float pre clean time 4 30 s
Float pre clean pressure cathode 4 20 mTorr
Float power cathode 4 17 W
Float set power cathode 4 17 W
Float act power cathode 4 17 W
Float voltage cathode 4 269.7 V
Float current cathode 4 0.06 A
Cathode 5
String target material Ag
String target ID Lesker 4N
Mag5-DC
Float ignition power cathode 5 50 W
Float pre clean power 5 50 W
Float pre clean time 5 30 s
Float pre clean pressure cathode 5 20 mTorr
Float power cathode 5 35 W
Float set power cathode 5 35 W
Float act power cathode 5 35 W
Float voltage cathode 5 302.8 V
Float current cathode 5 0.11 A

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