260121-KX-1

Type: Synthesis

ObjectId: 50479

Created: 1/21/2026 3:14:31 PM by A01) Pukhareva Natalia [Natalia.Pukhareva@ruhr-uni-bochum.de]

Updated: 9/14/2026 6:37:32 PM by INF) Victor Dudarev [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: on 15 nm Ti

[no file attached]

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All properties (except table)

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Type Name Value Comment
Int Main4Printing 1 Set it up to 1 for the main synthesis document for printing
general process parameters
String chamber KX K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String operator Adrian
Float start vacuum 2.7e-009 Torr
Float process duration 597 s
Float substrate temperature 23 °C
Float substrate rotation 0 RPM
String process gas Ar
Float table height 38.1 mm
Float cathode tilt 13 mm
Float substrate position 270 °
Float process pressure 5 mTorr
Float flow PG 30 sccm
target source configuration
Cathode 1
String target material Au
Mag1-RF
Float ignition power cathode 1 50 W
Float ramp duration 1 5 s
Float pre clean power 1 50 W
Float pre clean time 1 60 s
String pre clean pressure cathode 1 30 mTorr
Float power forward cathode 1 52 W
Float set power forward cathode 1 52 W
Float act power forward cathode 1 55 W
Float power reflected cathode 1 0 W
Float voltage cathode 1 56 V
Float load cathode 1 19 %
Float tune cathode 1 55 %
Cathode 2
String target material Ti
Mag2-DC
Float ignition power cathode 2 50 W
Float ramp duration 2 5 s
Float pre clean power 2 50 W
Float pre clean time 2 60 s
Float pre clean pressure cathode 2 30 mTorr
Float power cathode 2 70 W
Float set power cathode 2 70 W
Float act power cathode 2 70 W
Float voltage cathode 2 265 V
Float current cathode 2 0.269 A
Cathode 3
String target material Ag
Mag3-DC
Float ignition power cathode 3 50 W
Float ramp duration 3 5 s
Float pre clean power 3 50 W
Float pre clean time 3 60 s
Float pre clean pressure cathode 3 30 mTorr
Float power cathode 3 23 W
Float set power cathode 3 23 W
Float act power cathode 3 23 W
Float voltage cathode 3 305 V
Float current cathode 3 0.081 A
Cathode 6
String target material Pd
Mag6-DC
Float ignition power cathode 6 50 W
Float ramp duration 6 5 s
Float pre clean power 6 50 W
Float pre clean time 6 60 s
Float pre clean pressure cathode 6 30 mTorr
Float power cathode 6 70 W
Float set power cathode 6 70 W
Float act power cathode 6 69 W
Float voltage cathode 6 292 V
Float current cathode 6 0.247 A
Cathode 8
String target material Pt
Mag8-RF
Float ignition power cathode 8 50 W
Float ramp duration 8 5 s
Float pre clean power 8 50 W
Float pre clean time 8 60 s
Float pre clean pressure cathode 8 30 mTorr
Float power forward cathode 8 36 W
Float set power forward cathode 8 36 W
Float act power forward cathode 8 35 W
Float power reflected cathode 8 0 W
Float voltage cathode 8 77 V
Float load cathode 8 36 %
Float tune cathode 8 49 %

The table

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