6715 synthesis (adhesion layer, 220131-K1-1, id=58165)

Type: Synthesis

ObjectId: 77883 ExternalId: 58165

Created: 11/11/2023 11:09:05 PM by A01, B01) Savan Alan [alans327@gmail.com]

Updated: 9/10/2026 12:11:43 AM by INF) Victor Dudarev [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Synthesis for Sample 6715 (adhesion layer, 220131-K1-1, other / external, test 4 sapphire)

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Type Name Value Comment
general process parameters
Float start vacuum 1.2e-008 Torr
Float process duration 385 s
Float substrate temperature 22.6 °C
Float substrate rotation 0 RPM
String process gas Ar
Float table height 134 mm
Float process pressure 5 mTorr
Float flow PG 60 sccm
target source configuration
Cathode 5
String target material Ti
String target ID Goodfellow 4N
Mag5-RF
Float ignition power cathode 5 100 W
Float duration per step cathode 5 1 s
Float pre clean power 5 100 W
Float pre clean time 5 630 s
Float pre clean pressure cathode 5 15 mTorr
Float power forward cathode 5 200 W
Float power reflected cathode 5 0 W
substrate bias
RF substrate bias
Float bias power forward 30 W
Float bias power reflected 0 W

The table

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