6715 synthesis (co deposition, 220131-K3-1, id=58163)

Type: Synthesis

ObjectId: 77884 ExternalId: 58163

Created: 11/11/2023 11:09:05 PM by A01, B01) Savan Alan [alans327@gmail.com]

Updated: 9/10/2026 12:11:43 AM by INF) Victor Dudarev [vic.dudarev@gmail.com]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Synthesis for Sample 6715 (co deposition, 220131-K3-1, K7, test 4 sapphire)

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Type Name Value Comment
general process parameters
Float start vacuum 6.8e-008 Torr
Float process duration 600 s
Float substrate temperature 833 °C
Float substrate rotation 6 RPM
String process gas Ar
Float table height 25 mm
Float process pressure 5 mTorr
Float flow PG 30 sccm
target source configuration
Cathode 1
String target material Pd
String target ID FHR? 4N
Mag1-DC
Float ignition power cathode 1 50 W
Float duration per step cathode 1 1 s
Float pre clean power 1 50 W
Float pre clean time 1 30 s
String pre clean pressure cathode 1 30 mTorr
Float power cathode 1 35 W
Float voltage cathode 1 297 V
Float current cathode 1 0.17 A
Cathode 2
String target material Au
String target ID Sindlhauser 4N
Mag2-RF
Float ignition power cathode 2 50 W
Float duration per step cathode 2 5 s
Float pre clean power 2 50 W
Float pre clean time 2 30 s
Float pre clean pressure cathode 2 30 mTorr
Float power forward cathode 2 180 W
Float power reflected cathode 2 0 W
Cathode 3
String target material Ag
String target ID Lesker 4N
Mag3-DC
Float ignition power cathode 3 50 W
Float duration per step cathode 3 1 s
Float pre clean power 3 50 W
Float pre clean time 3 30 s
Float pre clean pressure cathode 3 30 mTorr
Float power cathode 3 256 W
Float voltage cathode 3 0.186 V
Cathode 4
String target material Pt
String target ID MaTecK 4N
Mag4-Pulsed DC
Float ignition power cathode 4 50 W
Float duration per step cathode 4 1 s
Float pre clean power 4 50 W
Float pre clean time 4 30 s
Float pre clean pressure cathode 4 30 mTorr
Float power cathode 4 180 W
Float voltage cathode 4 264 V
Float current cathode 4 0.68 A
Float frequency cathode 4 10000 Hz
Float pulse length cathode 4 5 µs

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