6751 synthesis (single material, 220325-K2-5, id=58421)

Type: Synthesis

ObjectId: 58260 ExternalId: 58421

Created: 11/11/2023 11:09:23 PM by A02) Zehl Rico [rico.zehl@gmail.com]

Updated: 7/13/2026 10:21:27 AM by C02) Perez Mendoza Alejandro Esteban [alejandro.perez-mendoza@uni-due.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Synthesis for Sample 6751 (single material, 220325-K2-5, K6 - Gero, 150 nm Pt on Si+SiO2)

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Type Name Value Comment
general process parameters
Float start vacuum 3.4e-008 Torr
Float process duration 1900 s
Float substrate temperature 25.3 °C
Float substrate rotation 10 RPM
String process gas Ar
String reactive gas 1 -
String flow RG 1 - sccm
String flow RG 2 - sccm
String reactive gas 2 -
Float table height 91.6 mm
Float substrate position -34.3 °
Float process pressure 5 mTorr
Float flow PG 50 sccm
Float end vacuum 1.9e-007 Torr
target source configuration
Cathode 1
String target material Pt
String target ID 1
Mag1-RF
Float ignition power cathode 1 60 W
String ramp power step cathode 1 - W
String duration per step cathode 1 - s
Float pre clean power 1 60 W
Float pre clean time 1 100 s
String pre clean pressure cathode 1 20 mTorr
Float power forward cathode 1 180 W
Float power reflected cathode 1 0 W
String voltage cathode 1 - V
String load cathode 1 - %
String tune cathode 1 - %
Float deposition rate 1 0.079 nm/s

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