Sputter Chambers

Model: ATC2200 SP-DN ORION, Serial Number: 18424. Location: ZGH Clean Room. PSU: HiPIMS - 2 items, DC - 3 items, RF - 3 items. DC ion source. Substrate bias (DC/RF). Interchangeable 1 - DC; 2 - DC; 3 - pulse DC; 4 - RF; 5 - RF; 6 - RF; 7 - HiPIMS 1; 8 -HiPIMS 2; bias - RF/DC; GLAD - For K9: 1 - DC; 2 - DC; 3 - RF; 4 - ; bias - RF GLAD (2") + DC => K2, K3, K4. K9 NEW 5x DC 3 x 1500W, 2 x 750W